Digital x-ray detector and fabrication method thereof
US7829861B2 · kind B2 · utility
0Cited by
18References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 28, 2008 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | May 6, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
Abstract
A digital x-ray detector and its fabrication method are disclosed to strengthen an electrical connection between an upper electrode and a lower by employing a multi-contact hole structure and obtaining reliability of a contact hole by electrically connecting the side of the lower line and the upper electrode. A semiconductor layer is inserted at a lower portion of the contact hole to prevent damage of a gate insulating layer possibly caused by an overetch to thus reduce a defective contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.