Microfabricated miniature grids
US7829864B2 · kind B2 · utility
0Cited by
9References
12Claims
0Family size
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Key dates
| Filing date | Apr 11, 2008 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | Jun 23, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/977
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.