Patent · US Active

Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same

US7830577B2 · kind B2 · utility

1Cited by

6References

15Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Thomas Grasshoff · Dresden, DE
Thomas Klose · Althengstett, DE
Thilo Sandner · Dresden, DE

Key dates

Filing date	Jan 3, 2008
Grant date	Nov 9, 2010
Priority date	—
Expiry date	Jan 31, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02527
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.