Imprinting apparatus and imprinting method
US7833464B2 · kind B2 · utility
0Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2008 |
| Grant date | Nov 16, 2010 |
| Priority date | — |
| Expiry date | Jul 22, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An imprinting apparatus and an imprinting method that prevents movement of an imprinting mold during an imprinting process. The imprinting method includes coating a resin on a substrate; aligning an imprinting mold on the resin; temporarily securing the imprinting mold on the substrate; pressing the imprinting mold; hardening the resin; and detaching the imprinting mold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.