Microfabricated bulk wave acoustic bandgap device
US7836566B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2010 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Apr 21, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 μm or less).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.