Polishing apparatus, polishing brush and manufacturing method of disk-shaped substrate
US7837536B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 21, 2007 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Jun 16, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D13/10
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The polishing apparatus that polishes an inner circumferential surface of a disk-shaped substrate including a portion having a hole at the center thereof, the polishing apparatus is provided with: a rotating table that holds piled workpieces in which a plurality of disk-shaped substrates are piled, a polishing brush that is inserted into a portion having the hole of the disk-shaped substrates of the piled workpieces and is rotated, a cover member that covers the piled workpieces, and a polishing-liquid flowing-in unit that flows polishing liquid into the portion having the hole of the disk-shaped substrates of the piled workpieces covered by the cover member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.