Patent · US Active

Array of small contacts for solar cell fabrication

US7838062B2 · kind B2 · utility

20Cited by
25References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 29, 2007
Grant dateNov 23, 2010
Priority date—
Expiry dateMar 28, 2028

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P70/50
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Fabrication of a solar cell using a printed contact mask. The contact mask may include dots formed by inkjet printing. The dots may be formed in openings between dielectric layers (e.g., polyimide). Intersections of overlapping dots may form gaps that define contact regions. The spacing of the gaps may be dictated by the alignment of nozzles that dispense the dots. Using the dots as a contact mask, an underlying dielectric layer may be etched to form the contact regions through the underlying dielectric layer. Metal contact fingers may be formed over the wafer to form electrical connections to corresponding diffusion regions through the contact regions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.