Process for collective manufacturing of small volume high precision membranes and cavities
US7838393B2 · kind B2 · utility
1Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2007 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Apr 26, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/019
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to a process for collective manufacturing of cavities and/or membranes (24), with a given thickness d, in a wafer said to be a semiconductor on insulator layer, comprising at least one semiconducting surface layer with a thickness d on an insulating layer, this insulating layer itself being supported on a substrate, this process comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.