Sensing membrane with stress releasing structure and micro-electro-mechanical system device using the same
US7839052B2 · kind B2 · utility
15Cited by
8References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2008 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Jan 28, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensing membrane applied to a micro-electro-mechanical system (MEMS) device includes a body, a stress releasing structure and a connecting portion. The stress releasing structure for releasing a membrane residual stress surrounds the body. The stress releasing structure has several first perforations and several second perforations. The first perforations are located between the body and the second perforations. The connecting portion connects the stress releasing structure and a substrate of the MEMS device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.