MEMS resonator having at least one resonator mode shape
US7839239B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2007 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Nov 22, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02503
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The invention relates to a MEMS resonator having at least one mode shape comprising: a substrate (2) having a surface (12), and a resonator structure (1), wherein the resonator structure (1) is part of the substrate (2), characterized in that the resonator structure (1) is defined by a first closed trench (3) and a second closed trench (3), the first trench (3) being located inside the second trench (3) so as to form a tube structure (1) inside the substrate (2), and the resonator structure (1) being released from the substrate (2) only in directions parallel to the surface (12). The invention further relates to a method of manufacturing such a MEMS resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.