System and method for controlling a beam source in a workpiece surface inspection system
US7839495B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2009 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Jun 8, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.