Confocal microscopy pad sample holder and method of hand using the same
US7839496B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 24, 2008 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Apr 17, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/34
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is a sample holder for confocal microscopy of CMP pad samples cut or otherwise removed from either new or used CMP pads that maintains a uniform load and pressure over the part of the sample visible to the confocal microscope by placing the pad behind a transparent window and holding it against the said window by a means comprising upper transparent window retaining means having an offset adjacent the transparent window having the same or essentially the same refractive index as the pad material so that when the pad is held against the transparent window, the edges of the pad are outside the outer edge of the transparent window; lower pad retaining means to press the pad under a known/load against the transparent window, which lower pad retaining means has a size less than the size of the pad; spherical force transmitting means pressed against the lower pad retaining means;, through a load cell to measure the load transferred to the sample through lower pad retaining means, the spherical force transmitting means, the force transfer means and load cell from the posterior structural housing of the sample holder which is forced together with the said window retai…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.