Microfabricated acoustic transducer with a multilayer electrode
US7839722B2 · kind B2 · utility
9Cited by
7References
19Claims
0Family size
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Key dates
| Filing date | Sep 20, 2007 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Apr 23, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49005
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a capacitive membrane ultrasound transducer, one or more electrodes include multiple layers of conductive or semiconductive material. The layers may be positioned adjacent an insulator or cavity in an arrangement to reduce electrical degradation. For example, a conductive layer with less work function and less resistivity is spaced from an insulator by a conductive layer with more work function and more resistivity. The different layers of electrode material may provide for less electrical degradation due to the type of material used and relative location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.