Surface acoustic wave (SAW) based pressure sensor
US7841241B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2006 |
| Grant date | Nov 30, 2010 |
| Priority date | — |
| Expiry date | Feb 6, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A SAW based pressure sensor having a base 2a with an aperture 3 formed therein and a substrate 4 mounted on the base so as to completely overlie the aperture. The substrate 4 is adhered to base 2a so as to form a fluid tight seal around the periphery of the aperture 3. A first SAW resonator 5 is mounted on the substrate 4 wholly within the region overlying the aperture 3, with two further SAW resonators 6, 7 being mounted on the substrate wholly within a region which is stiffened by adhesion to the underlying base 2a , such that the two further SAW resonators 6, 7 are completely decoupled from the strain field arising in the substrate due to deflections thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.