Deflectable micromechanical system and use thereof

US7841242B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Holger Conrad · Dresden, DE
• Thomas Klose · Althengstett, DE
• Thilo Sandner · Dresden, DE

Key dates

• Filing date: Feb 3, 2006
• Grant date: Nov 30, 2010
• Expiry date: Feb 3, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0055
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.