Patent · US Active

Sputter apparatus with a pipe cathode and method for operating this sputter apparatus

US7842167B2 · kind B2 · utility

1Cited by

5References

22Claims

0Family size

Assignee

Applied Materials GmbH & Co. KG · DE

Inventors

Jurgen Henrich · Limeshain, DE
Andreas Sauer · Großostheim, DE
Andreas Geiss · Bischofsmais, DE
Felix Brinckmann · Roßdorf, DE

Key dates

Filing date	Aug 3, 2006
Grant date	Nov 30, 2010
Priority date	—
Expiry date	Dec 17, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3423
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.