Camera based vision alignment with device group guiding for semiconductor device testing handlers
US7842912B2 · kind B2 · utility
4Cited by
8References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2008 |
| Grant date | Nov 30, 2010 |
| Priority date | — |
| Expiry date | Sep 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A vision alignment system and method is provided. The vision alignment system includes one or more grouped alignment plates with guiding inserts configured to receive multiple devices, and groups of three actuators, configured to actuate the alignment plates to correct the position offsets of multiple devices as a group. The position offsets between the device and contactor are determined by a device-view camera during runtime and a contactor-view camera during calibration time. The vision alignment system also includes a pick-and-place handler, configured to transport devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.