Semiconductor devices including buried bit lines
US7846796B2 · kind B2 · utility
4Cited by
6References
5Claims
0Family size
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Key dates
| Filing date | Jun 1, 2010 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Jun 1, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/053
Abstract
A semiconductor device includes a plurality of channel structures on a semiconductor substrate. A bit line groove having opposing sidewalls is defined between sidewalls of adjacent ones of the plurality of channel structures. A plurality of bit lines are formed on corresponding ones of the opposing sidewalls, and the plurality of bit lines are electrically isolated from each other
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.