Electrostatic chuck with heater
US7848075B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2007 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Mar 7, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68757
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck with a heater including: a base which is composed of a sintered body containing alumina, an electrode disposed in an upper part of the base, and a resistance heating element embedded in a lower part of the base. The base includes a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base. The dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %. Moreover, the resistance heating element is formed into a coil and mainly composed of niobium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.