Patent · US Active

Forming a sacrificial layer in order to realise a suspended element

US7851366B2 · kind B2 · utility

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0References

5Claims

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Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Fabrice Casset · Tencin, FR
Sofiane Soulimane · Toulouse, FR

Key dates

Filing date	Sep 12, 2007
Grant date	Dec 14, 2010
Priority date	—
Expiry date	Oct 16, 2028

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0108
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to a method of realization of a sacrificial layer, including the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.