Piezoelectric-actuator driving device and exposure apparatus including the same
US7851969B2 · kind B2 · utility
0Cited by
3References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 2008 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Apr 14, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving device includes a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers, a failure detecting unit configured to detect failure of the laminated units, a plurality of switches provided corresponding to the laminated units and configured to enable and disable current supply to the laminated units, and a driving circuit configured to supply a current for driving to a normal laminated unit of the laminated units, on the basis of an output from the failure detecting unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.