Piezoceramic multilayer actuator manufactured according to particular sintering parameters and corresponding method of manufacturing

US7851974B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Bernhard Döllgast · Wolfsberg, AT
• Masahiro Inagaki · Kariya, JP
• Harald Kastl · Wolfsberg, AT
• Atsushi Ochi · Otsu, JP
• Takami Sakamoto · Kirishima, JP
• Carsten Schuh · Baldham, DE

Key dates

• Filing date: Feb 15, 2008
• Grant date: Dec 14, 2010
• Expiry date: May 1, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42

Abstract

A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) has a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) has a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.