Piezo actuator comprising a multilayer encapsulation, and method for the production thereof

US7851978B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Heiner Bayer · Olching, DE
• Hellmut Freudenberg · Bad Abbach, DE
• Axel Ganster · Schwindegg, DE
• Christoph Hamann · Tauberbischofsheim, DE
• Oliver Hennig · Löwenstein, DE
• Jens Dahl Jensen · Berlin, DE
• Günter Lugert · Birkenfeld, DE
• Randolf Mock · Munich, DE
• Carsten Schuh · Baldham, DE
• Jörg Zapf · Munich, DE

Key dates

• Filing date: Apr 24, 2007
• Grant date: Dec 14, 2010
• Expiry date: Apr 24, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42

Abstract

In a method for producing a multilayer encapsulation (1) of a piezo actuator (5) such that the piezo actuator (5) is protected towards the outside without having to use an additional enveloping housing-type structure, in order to produce the multilayer encapsulation (1), an electrically insulating elastic layer (10) is first applied to the surface of the piezo actuator (5), whereupon a metallic layer is applied to the electrically insulating elastic layer (10) so as to planarly cover the same.