Device and method for electrical contacting semiconductor devices for testing
US7852095B2 · kind B2 · utility
1Cited by
1References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 18, 2008 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Mar 12, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31905
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device and method are disclosed for electrical contacting of semiconductor devices for testing. One embodiment provides for testing semiconductor devices or integrated circuits, including a probe card with contact tips for the electrical contacting of the semiconductor devices. The electrical connection of at least one contact tip to the test system is adapted to be switched via a resistively switching memory cell. A resistively switching memory cell in the form of a nano switch is integrated in the electrical connection of the contact tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.