Observation apparatus provided with immersion objective lens
US7852552B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2008 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Feb 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/367
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An observation apparatus for observing an observation object mounted at an observation position on a stage through an immersion objective lens placed below the observation object. The observation apparatus has a liquid pouring device, constructed to be relatively movable with respect to the immersion objective lens, pouring a liquid on a top lens surface of the immersion objective lens from the upper side of the immersion objective lens at a distance from the observation position on the stage; and a position control device automatically adjusting relative positions of a liquid pouring position of the liquid pouring device and the immersion objective lens and automatically adjusting relative positions of the immersion objective lens on which the liquid is poured by the liquid pouring device and a desired observation position on the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.