Flow rate verification failure diagnosis apparatus, flow rate verification failure diagnosis system, flow rate verification failure diagnosis method, and control program product for flow rate verification failure diagnosis
US7853416B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2008 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Mar 5, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/15
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.