Hermetic chamber with electrical feedthroughs
US7854172B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2009 |
| Grant date | Dec 21, 2010 |
| Priority date | — |
| Expiry date | May 11, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/096
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.