Patent · US Active

Imprint stamp comprising cyclic olefin copolymer

US7854873B2 · kind B2 · utility

6Cited by

6References

27Claims

0Family size

Assignee

OBDUCAT AB · SE

Inventors

Babak Heidari · Furulund, SE
Marc Beck · Malmö, SE
Matthias Keil · Malmö, SE

Key dates

Filing date	Jun 12, 2006
Grant date	Dec 21, 2010
Priority date	—
Expiry date	Apr 13, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/31504
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint a replica of the pattern of the template surface in therein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.