Acoustic wave device physical parameter sensor
US7855564B2 · kind B2 · utility
6Cited by
8References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2008 |
| Grant date | Dec 21, 2010 |
| Priority date | — |
| Expiry date | Feb 5, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/095
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acoustic wave sensor employs an electromagnetic device (EMD) to transduce and amplify the response of an impedance element to a physical measurand. A measurand is defined as a physical parameter being quantified by measurement. One embodiment uses a magnetic field sensor employing a microelectromechanical system (MEMS) capacitor to affect a change in the response of a SAW filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.