Piezoelectric substance element, piezoelectric substance film manufacturing method, liquid discharge head and liquid discharge apparatus
US7857431B2 · kind B2 · utility
4Cited by
4References
18Claims
0Family size
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Key dates
| Filing date | Jan 18, 2006 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Mar 21, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/878
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric substance element has a piezoelectric substance film and a pair of electrodes connected to the piezoelectric substance film on a substrate, and a main component of the piezoelectric substance film is Pb(Zr, Ti)O3, a composition ratio of Zr/(Zr+Ti) is over 0.4 but less than 0.7, the piezoelectric substance film is a film having at last a tetragonal crystal a-domain and a c-domain within a range of ±10° with respect to the surface of the substrate, and a volume rate of the c-domain to the total of the a-domain and the c-domain is equal to or larger than 20% and equal to or smaller than 60%.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.