Method for treating the surface of object and apparatus thereof
US7857952B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 31, 2007 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Aug 13, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32134
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for treating the surface of an object to be treated comprising introducing a surface treatment fluid into a reaction vessel (4) capable of receiving an object, introducing the surface treatment fluid into a separation vessel (14) after the object is subjected to surface treatment, and circulating the surface treatment fluid, from which a contaminant has already been removed, to the reaction vessel (4). At the time of treatment on the surface of the object, a circulation passage for the surface treatment fluid including the reaction vessel (4) is communicated and the surface treatment fluid is constantly circulated through the circulation passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.