Soft template with alignment mark
US7858010B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2007 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Feb 13, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pattern template includes a flexible substrate, a template mold formed on the flexible substrate to include a pattern, and an alignment mark, the alignment mark has a greater refractive index than that of the template mold. The template is manufactured by providing a master template including a pattern area, coating resin for mold in the pattern area, forming a template mold by installing a flexible plate on the resin for mold and curing the resin for mold by radiating UV rays, separating the template mold and the master template, coating a metal thin film on the template mold, and forming an alignment mark at both sides of the template mold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.