Patent · US Active

Edge termination for semiconductor device

US7859076B2 · kind B2 · utility

11Cited by
2References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 22, 2006
Grant dateDec 28, 2010
Priority date
Expiry dateJun 23, 2026

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/126

Abstract

A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field regions (46). Pillars (40) may be provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.