Edge termination for semiconductor device
US7859076B2 · kind B2 · utility
11Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 2006 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Jun 23, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/126
Abstract
A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field regions (46). Pillars (40) may be provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.