Fast three-dimensional shape measuring apparatus and method
US7859683B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 18, 2009 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Jun 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein is an apparatus for measuring the shape of a 3D object using an interferometer. The apparatus includes a light source unit, a beam splitter, a reference mirror, an actuator, an image pickup device, and a control unit. The light source unit emits light. The beam splitter divides the light from the light source unit. The reference mirror reflects light as a reference beam. The actuator moves the reference mirror. The image pickup device acquires a plurality of interference patterns by causing the reflected beam and the reference beam to interfere with each other. The control unit measures the shape of the object from the acquired interference patterns, outputs reference mirror drive signals to the actuator, and issues an image capture command at the end of image capture time that is shorter than settling time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.