Wafer center finding with charge-coupled devices
US7859685B2 · kind B2 · utility
2Cited by
2References
28Claims
0Family size
Inventor
Key dates
| Filing date | Feb 15, 2008 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Jun 27, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.