Process of geometrical characterisation of structures and device for implementing said process
US7860686B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2005 |
| Grant date | Dec 28, 2010 |
| Priority date | — |
| Expiry date | Oct 28, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A structure, decomposable into at least one elementary structure or base element, is illuminated and then provides an optical response, at least one geometrical parameter of the base element is determined, and a value is attributed to it, a regression algorithm is implemented which determines modified values of the parameter(s), in order to make the difference between the theoretical response of the base element and the acquired result at most equal to a threshold, and to obtain an image of the structure, and as long as the separation between the acquired and theoretical responses is not satisfactory, new subdivisions of the base element(s) are performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.