Flat-panel display semiconductor process for efficient manufacturing
US7863115B2 · kind B2 · utility
1Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2008 |
| Grant date | Jan 4, 2011 |
| Priority date | — |
| Expiry date | Dec 9, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/268
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An embodiment is a method and apparatus to fabricate a flat panel display. A poly-last structure is formed for a display panel using an amorphous silicon or amorphous silicon compatible process. The poly-last structure has a channel silicon precursor. The display panel is formed from the poly-last structure using a polysilicon specific or polysilicon compatible process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.