Micro electro mechanical system using comb and parallel plate actuation
US7863799B1 · kind B1 · utility
8Cited by
15References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 1, 2008 |
| Grant date | Jan 4, 2011 |
| Priority date | — |
| Expiry date | May 3, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.