Reflective scatterometer
US7864324B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2009 |
| Grant date | Jan 4, 2011 |
| Priority date | — |
| Expiry date | Sep 3, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A reflective scatterometer capable of measuring a sample is provided. The reflective scatterometer includes a paraboloid mirror, a light source, a first reflector, a second reflector and a detector. The paraboloid mirror has an optical axis and a parabolic surface, wherein the sample is disposed on the focal point of the parabolic surface and the normal direction of the sample is parallel with the optical axis. A collimated beam generated from the light source is reflected by the first reflector to the parabolic surface and then is reflected by the parabolic surface to the sample to form a first diffracted beam. The first diffracted beam is reflected by the parabolic surface to the second reflector and is then reflected by the second reflector to the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.