Patent · US Active

Wavefront analysis method involving multilateral interferometry with frequency difference

US7864340B2 · kind B2 · utility

2Cited by
14References
8Claims
0Family size

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Key dates

Filing dateAug 7, 2008
Grant dateJan 4, 2011
Priority date
Expiry dateSep 15, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J2009/0226
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The method comprises positioning a diffraction grating with a two-dimensional meshing on the path of the beam to be analyzed and processing at least two interferograms of at least two different colors, each interferogram being obtained in a plane from two sub-beams with different diffraction orders. The invention can be used to analyze and correct divided wavefronts.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.