Method of fabricating micromirror device
US7866036B2 · kind B2 · utility
0Cited by
15References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2008 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | Feb 27, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.