Integrated MEMS resonator device
US7868403B1 · kind B1 · utility
5Cited by
3References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2007 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | Jun 15, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0742
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present invention provides a method for manufacturing a micro-electro-mechanical system (MEMS) resonator device using the same device layer, dielectric layer, and conductive layer that is used to create other electrical devices in a complementary metal oxide semiconductor (CMOS) process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.