Nano-positioning electromagnetic linear actuator
US7868492B2 · kind B2 · utility
1Cited by
9References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2006 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | Oct 2, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2213/03
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A flexure for an electromagnetic nano-positioning linear actuator having a support and an actuating body, the flexure comprising: a first resilient end for attaching to the support; a second resilient end for attaching to the actuating body; and a substantially rigid intermediate portion located between the first resilient end and the second resilient end.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.