Lamb wave resonator
US7868517B2 · kind B2 · utility
20Cited by
13References
30Claims
0Family size
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Key dates
| Filing date | Oct 21, 2008 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | Jul 20, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02228
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.