Microscopic-measurement apparatus
US7869039B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2008 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | May 8, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/365
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system. The microscopic-measurement apparatus for acquiring optical information from desired portions of a sample by moving a measuring optical axis on a surface of the sample includes an observation-image display section for displaying a sample surface image as an observation image, in a range of visual field which is observable at a present sample position; an optical-axis display section for displaying areas to be measured and a present position of the measuring optical axis in an overlapped state with the observation image; an area setting section capable of setting measuring areas by expanding, reducing, changing in shape and moving the areas to be measured; and an optical-information acquisition section for measuring one set measuring area or several set measuring areas successively with an instruction of starting measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.