Patent · US Active

Method and device for the operation of a plasma device

US7869556B2 · kind B2 · utility

2Cited by

8References

37Claims

0Family size

Assignee

Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

Gregor Morfill · Birkenfeld, DE
Uwe Konopka · Neufahrn, DE
Hubertus Thomas · Pfaffenhofen an der Ilm, DE
Wolfgang Jacob · Horb, DE
Beatrice Annaratone · Birkenfeld, DE
Martin Fink · Unterbernbach, DE
Noriyoshi Sato · Yokohama, JP
Tetsuji Shimizu · Garching bei München, DE
Timo Stuffler · Landsberied, DE

Key dates

Filing date	Dec 9, 2005
Grant date	Jan 11, 2011
Priority date	—
Expiry date	Nov 24, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32568
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for the operation of a plasma device (100) is described in which particles (2) are arranged in a plasma, wherein a generation of electric travelling waves (1) is provided, under whose effective action the particles (2) in the plasma device (100) perform a directed movement to at least one pre-determined collection area (20, 20A). A plasma device for carrying out the method is also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.