Method and system for high-speed, precise micromachining an array of devices

US7871903B2 · kind B2 · utility

Assignee

• The GSI Group, LLC · US

Inventors

• Bruce L. Couch · Attleboro, US
• Jonathan S. Erhmann · Sudbury, US
• Yun Fee Chu · Natick, US
• Joseph V. Lento · Methuen, US
• Shepard D. Johnson · Andover, US

Key dates

• Filing date: Dec 22, 2009
• Grant date: Jan 18, 2011
• Expiry date: Dec 22, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K2103/50
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. Beam scanning and deflection are both used to distribute beam spots to elements of an array of elements for selective processing. The deflection can be performed with a solid state deflector.