Suspended nanowire sensor and method for fabricating the same
US7872324B2 · kind B2 · utility
8Cited by
4References
18Claims
0Family size
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Key dates
| Filing date | Oct 31, 2007 |
| Grant date | Jan 18, 2011 |
| Priority date | — |
| Expiry date | Apr 13, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Provided is a suspended nanowire sensor having good sensing characteristics and suitable for mass production, a method for fabricating the suspended nanowire sensor. The suspended nanowire sensor includes: first and second sensor electrodes formed on upper portions of a substrate and physically separated from each other; and a nanowire sensor material piece extending from the first sensor electrode to the second sensor electrode and physically suspended between the first and second sensor electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.