MEMS device with two axes comb drive actuators
US7872394B1 · kind B1 · utility
74Cited by
16References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2002 |
| Grant date | Jan 18, 2011 |
| Priority date | — |
| Expiry date | Jun 14, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to actuate the movable structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.