Vibrator array, manufacturing method thereof, and ultrasonic probe
US7872949B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 21, 2008 |
| Grant date | Jan 18, 2011 |
| Priority date | — |
| Expiry date | Nov 21, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1089
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
In an ultrasonic transducer array, a plurality of vibrators arranged in an array is bonded to a base plate by bond material. The bond material bonds the bottom of the each vibrator to the base plate in a manner to surround lower part of the side face of the vibrator. A filling material is filled in between the vibrators. The filling material has a multi-layer structure of different rigidity. In a double layer structure of the filling material, it is preferable that thickness ratio of layer of filling material at the base plate side (lower side) to the other layer of the filling material is 1:1 to 1:3. Preferably, a beam is provided for connecting the side faces of the adjacent vibrators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.